Gas panel for regulating and controlling of the gas flow rate, working with plasma technology, comprising - an electronic mass flow regulator, suitable for receiving and sending of analogue and digital signals - four pressure transducers, - two or more pressure valves, - electric interfaces and - several connectors for gas lines - suitable for in-situ plasma bonding processes or for multi frequency bond activating processes
Part of: 903289 — Other instruments and apparatus — Other
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